Concepedia

P. T. Chen

PT

Statistics

Publications

2

Citations

120

H-Index

2

Active since

2005

Affiliations

Stanford University(Current)

P. T. Chen is an author at Stanford University specializing in industrial instrumentation, manufacturing process simulation, and production control.

Publications per year

2005–2007

2

Publications

2

Virtual metrology: a solution for wafer to wafer advanced process control

P. T. Chen, S.Y. Wu, Junshien Lin et al. · 2005 · 99 citations

, , +10

Electron spin resonance study of as-deposited and annealed (HfO2)x(SiO2)1−x high-κ dielectrics on Si

B. B. Triplett, P. T. Chen, Yoshio Nishi et al. · Journal of Applied Physics · 2007 · 21 citations

, , +17

1–2 of 2