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Virtual metrology: a solution for wafer to wafer advanced process control
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2005
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Virtual ManufacturingEngineeringComputer ArchitectureVirtual InstrumentationAdditional Real MetrologyDimensional MetrologyHardware VirtualizationVirtual RealitySystems EngineeringAdvanced Process ControlComputer EngineeringIndustrial DesignVirtual EngineeringVirtual MetrologyProcess ControlBusinessTool Slate VariablesTechnologyIndustrial Process ControlMetrologyVirtual PrototypingVirtual Machine
Virtual metrology (VM) is a novel technology to predict wafer performance from tool slate variables. Virtual metrology can enable wafer to wafer control without additional real metrology.