Statistics
Publications
13
Citations
394
H-Index
13
Active since
2001
Affiliations
C. H. Yu is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, electrical engineering, and microelectronics.
Publications per year
2001–2021
13
13
Virtual metrology: a solution for wafer to wafer advanced process control
P. T. Chen, S.Y. Wu, Junshien Lin et al. · 2005 · 99 citations
Engineering, Industrial Engineering, Manufacturing Engineering +10
The 3rd dimension-More Life for Moore's Law
C. H. Yu · 2006 · 29 citations
1–5 of 13