11
Publications
530
Citations
11
H-Index
1996
Active since
S. G. Malhotra is an author at IBM (United States) specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceElectronic PackagingElectrical EngineeringMicroelectronicsThin FilmsSurface ScienceMaterials EngineeringNanoelectronics
Publications per year
1996–2005
11
11
A high performance liner for copper damascene interconnects
D. Edelstein, Cyprian Uzoh, C. Cabral et al. · 2001 · 90 citations
Materials Science, 3D Ic Architecture, Electrical Engineering +13
Analysis of thin film stress measurement techniques
S. G. Malhotra, Z. U. Rek, S. M. Yalisove et al. · Thin Solid Films · 1997 · 65 citations
Electromigration Cu mass flow in Cu interconnections
C.‐K. Hu, D. Canaperi, S.T. Chen et al. · Thin Solid Films · 2005 · 34 citations
Electrical Engineering, Electromigration Technique, Engineering +7
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