Ziwei Fang

Plasma doping for the fabrication of ultra-shallow junctions

Susan B. Felch, Ziwei Fang, Bon Wong Koo et al. · Surface and Coatings Technology · 2002 · 46 citations

Engineering, Physics, Nanoelectronics +4

Plasma doping for shallow junctions

Matthew Goeckner, Susan B. Felch, Ziwei Fang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 28 citations

Shallow Junctions, Engineering, Bf3 Plasma +17

Ion energy distributions in a pulsed plasma doping system

Svetlana Radovanov, Ludovic Godet, Rajesh Dorai et al. · Journal of Applied Physics · 2005 · 20 citations

Electrical Engineering, Pulsed Dc Plasma, Ion Energy Distributions +11

Plasma doping system for 200 and 300 mm wafers

R.B. Liebert, S.R. Walther, Susan B. Felch et al. · 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432) · 2003 · 16 citations

Materials Engineering, Electrical Engineering, Plasma Ignition +12

USJ formation using pulsed plasma doping

J.T. Scheuer, D. Lenoble, J.-P. Reynard et al. · Surface and Coatings Technology · 2004 · 13 citations

Engineering, Physics, Applied Physics +4