Concepedia

Ludovic Godet

LG

Statistics

Publications

12

Citations

267

H-Index

11

Active since

2004

Affiliations

STMicroelectronics (France)(Current)

Varian Medical Systems (United States)

Stanford University

Applied Materials (United States)

Nantes Université

Ludovic Godet is an author at STMicroelectronics (France) specializing in semiconductor devices, natural sciences, and materials science.

Publications per year

2004–2020

12

Publications

12

A Process for Topographically Selective Deposition on 3D Nanostructures by Ion Implantation

Woo‐Hee Kim, Fatemeh Hashemi, Adriaan J. M. Mackus et al. · ACS Nano · 2016 · 104 citations

, , +17

Plasma Diagnostics in Pulsed Plasma Doping (P<tex>$^2$</tex>LAD) System

B.-W. Koo, Ludovic Godet, Svetlana Radovanov et al. · IEEE Transactions on Plasma Science · 2004 · 24 citations

, , +7

Ion energy distributions in a pulsed plasma doping system

Svetlana Radovanov, Ludovic Godet, Rajesh Dorai et al. · Journal of Applied Physics · 2005 · 20 citations

, , +14

Structurally Stable Manganese Alkoxide Films Grown by Hybrid Molecular Layer Deposition for Electrochemical Applications

David S. Bergsman, Jon G. Baker, Richard G. Closser et al. · Advanced Functional Materials · 2019 · 20 citations · Full text

, , +17

Enhanced Performance of PMOS MUGFET via Integration of Conformal Plasma-Doped Source/Drain Extensions

D. Lenoble, K. Anil, A. De Keersgieter et al. · 2006 · 18 citations

, , +16

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