Concepedia
Statistics
Publications
47
Citations
1.4K
H-Index
23
Active since
1989
Affiliations
The University of Texas at Dallas(Current)
University of Iowa
University of Wisconsin–Madison
Varian Medical Systems (United States)
West Virginia University
Matthew Goeckner is an author at The University of Texas at Dallas specializing in engineering, applied physics, and physics.
Top concepts
EngineeringApplied PhysicsPhysicsSpectroscopyPlasma PhysicsNatural SciencesElectrical EngineeringMaterial SciencePlasma ConfinementChemistry
Publications per year
1989–2021
Model of energetic electron transport in magnetron discharges
T. E. Sheridan, Matthew Goeckner, J. Goree · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 142 citations
Electrical Engineering, Engineering, Physics +12
Observation of two-temperature electrons in a sputtering magnetron plasma
T. E. Sheridan, Matthew Goeckner, J. Goree · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 115 citations
Magnetism, Engineering, Physics +8
Monte Carlo simulation of ions in a magnetron plasma
Matthew Goeckner, J. Goree, T. E. Sheridan · IEEE Transactions on Plasma Science · 1991 · 88 citations
Engineering, Plasma Science, Plasma Physics +17
Measurements of ion velocity and density in the plasma sheath
Matthew Goeckner, J. Goree, T. E. Sheridan · Physics of Fluids B Plasma Physics · 1992 · 75 citations
Engineering, Laser Plasma Physic, Plasma Science +17
Measurements of the presheath in an electron cyclotron resonance etching device
J. A. Meyer, Gon‐Ho Kim, Matthew Goeckner et al. · Plasma Sources Science and Technology · 1992 · 49 citations
Engineering, Electron-beam Lithography, Microscopy +19
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