Concepedia

Matthew Goeckner

MG

47

Publications

1.4K

Citations

23

H-Index

1989

Active since

Affiliations

The University of Texas at Dallas(Current)

University of Iowa

University of Wisconsin–Madison

Varian Medical Systems (United States)

West Virginia University

Matthew Goeckner is an author at The University of Texas at Dallas specializing in engineering, applied physics, and physics.

Top concepts

EngineeringApplied PhysicsPhysicsSpectroscopyPlasma PhysicsNatural SciencesElectrical EngineeringMaterial SciencePlasma ConfinementChemistry

Publications per year

1989–2021

47

Publications

47

Model of energetic electron transport in magnetron discharges

T. E. Sheridan, Matthew Goeckner, J. Goree · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 142 citations

Electrical Engineering, Engineering, Physics +12

Observation of two-temperature electrons in a sputtering magnetron plasma

T. E. Sheridan, Matthew Goeckner, J. Goree · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 115 citations

Magnetism, Engineering, Physics +8

Monte Carlo simulation of ions in a magnetron plasma

Matthew Goeckner, J. Goree, T. E. Sheridan · IEEE Transactions on Plasma Science · 1991 · 88 citations

Engineering, Plasma Science, Plasma Physics +17

Measurements of ion velocity and density in the plasma sheath

Matthew Goeckner, J. Goree, T. E. Sheridan · Physics of Fluids B Plasma Physics · 1992 · 75 citations

Engineering, Laser Plasma Physic, Plasma Science +17

Measurements of the presheath in an electron cyclotron resonance etching device

J. A. Meyer, Gon‐Ho Kim, Matthew Goeckner et al. · Plasma Sources Science and Technology · 1992 · 49 citations

Engineering, Electron-beam Lithography, Microscopy +19

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