S.R. Walther

Production of H− ions with addition of cesium or xenon to a hydrogen discharge in a small multicusp ion source

S.R. Walther, K. N. Leung, W. B. Kunkel · Journal of Applied Physics · 1988 · 87 citations

Engineering, Glow Discharge, Chemistry +16

Optimization of H− production from a small multicusp ion source

K. N. Leung, C. A. Hauck, W. B. Kunkel et al. · Review of Scientific Instruments · 1989 · 78 citations

Pulsed Operation, Hydrogen Production, Engineering +18

Plasma doping for the fabrication of ultra-shallow junctions

Susan B. Felch, Ziwei Fang, Bon Wong Koo et al. · Surface and Coatings Technology · 2002 · 46 citations

Engineering, Physics, Nanoelectronics +4

Electron-suppression experiments in a small multicusp H− source

K. N. Leung, C. A. Hauck, W. B. Kunkel et al. · Review of Scientific Instruments · 1990 · 24 citations

Electrical Engineering, Electron-suppression Experiments, Engineering +10

Characteristics of a compact microwave ion source

S.R. Walther, K. N. Leung, W. B. Kunkel · Review of Scientific Instruments · 1986 · 20 citations

Electrical Engineering, Engineering, Radio Frequency +12