Concepedia

Publication | Closed Access

Plasma doping for the fabrication of ultra-shallow junctions

DOI

46

Citations

4

References

2002

Year

Susan B. Felch, Ziwei Fang, Bon Wong Koo, R.B. Liebert, S.R. Walther, D. Hacker
Surface and Coatings Technology

References

YearCitations

Page 1