Yasunobu Onishi is an author at Toshiba (Japan) specializing in engineering, materials science, and chemistry.
Top concepts
EngineeringMaterial ScienceChemistryOrganic ChemistryPolymer SciencePolymer ChemistryPolymersPhotochemistryMicrofabricationChemical Engineering
Publications per year
1981–2007
11
11
Sub-55 nm Etch Process Using Stacked-Mask Process
Itsuko Sakai, Junko Abe, Hisataka Hayashi et al. · Japanese Journal of Applied Physics · 2007 · 15 citations
Rows per page
1–5 of 11