High molecular weight polysilanes with phenol moieties

Rumiko Horiguchi, Yasunobu Onishi, Shuzi Hayase

Macromolecules

Phenol MoietiesEngineeringAltmetric Attention ScoreOrganic ChemistryChemistry +17

Syntheses of polysilanes with functional groups. 2. Polysilanes with carboxylic acids

Shuzi Hayase, Rumiko Horiguchi, Yasunobu Onishi, +1

Macromolecules

Organic Material ChemistryCarboxylic AcidsEngineeringMacromolecules 1989Macromolecular Chemistry +9

Photopolymerization of epoxides. A new type of photopolymerization with photodecomposable silyl ether as coinitiator

Shuzi Hayase, Yasunobu Onishi, Shuichi Suzuki, +1

Macromolecules

EngineeringNew TypeAltmetric Attention ScoreSynthetic PhotochemistryOrganic Chemistry +16

Photopolymerization of cyclohexene oxide by the use of photodecomposable silyl peroxide. Aluminum complex/arylsilyl peroxide catalyst

Shuzi Hayase, Yasunobu Onishi, Shuichi Suzuki, +1

Macromolecules

Materials ScienceCyclohexene OxideChemical EngineeringEngineeringPhotoredox Process +10

Sub-55 nm Etch Process Using Stacked-Mask Process

Itsuko Sakai, Junko Abe, Hisataka Hayashi, +4

Japanese Journal of Applied Physics

Materials ScienceFluorocarbon GasEngineeringSoc Line PatternMicrofabrication +10

Resist edge roughness with reducing pattern size

Eishi Shiobara, Daisuke Kawamura, Kentaro Matsunaga, +4

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Specific ResistanceResistorResist Edge RoughnessMechanical EngineeringAcid Concentration +1

Acid catalyzed resist for KrF excimer laser lithography.

Yasunobu Onishi, Hirokazu Niki, Y. Kobayashi, +3

Journal of Photopolymer Science and Technology

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabrication +4

Contact hole formation by multiple exposure technique in ultralow-k 1 lithography

Hiroko Nakamura, Yasunobu Onishi, Kazuya Satõ, +4

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringElectron-beam LithographyTarget FabricationBeam LithographyNanolithography +15

Polymerization of cyclohexene oxide with aluminum complex/silanol catalyst. VI. Oligomer and polymer effects

Shuzi Hayase, Yasunobu Onishi, Shuichi Suzuki, +1

Journal of Polymer Science Polymer Chemistry Edition

EngineeringOrganic ChemistryChemistryPolymersChemical Engineering +16

Annulenediones having quinonoid properties

Masahiko Iyoda, Yasunobu Onishi, Masazumi Nakagawa

Tetrahedron Letters

Organic ChemistryQuinonoid PropertiesHeterocyclic