Junko Abe

Formation mechanism of sidewall striation in high-aspect-ratio hole etching

Mitsuhiro Omura, Jun-ichi Hashimoto, Takahiro ADACHI et al. · Japanese Journal of Applied Physics · 2019 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of preparation procedure on redox states of iron in soda-lime silicate glass

Masaru Yamashita, Tomoko Akai, Ryosuke Sawa et al. · Journal of Non-Crystalline Solids · 2008 · 30 citations

Natural Sciences, Chemistry, Materials Science +16

Sub-45 nm SiO₂ Etching with Stacked-Mask Process Using High-Bias-Frequency Dual-Frequency-Superimposed RF Capacitively Coupled Plasma

Keisuke Kikutani, Takashi Ohashi, Akihiro Kojima et al. · Japanese Journal of Applied Physics · 2008 · 17 citations

Engineering, Materials Engineering, Materials Science +12

Preparation of PtMnSb thin films and magneto-optical properties.

R. Ohyama, Junko Abe, K. Matsubara · Journal of the Magnetics Society of Japan · 1985 · 17 citations · Full text

Natural Sciences, Materials Science, Physics +17

A manufacturable copper/low-k SiOC/SiCN process technology for 90 nm-node high performance eDRAM

Katsumi Higashi, Norimasa Nakamura, Hiromi Miyajima et al. · 2003 · 15 citations

Engineering, Electrical Engineering, Materials Science +16