Concepedia

Keisuke Kikutani

KK

1

Publications

17

Citations

1

H-Index

2008

Active since

Affiliations

Toshiba (Japan)(Current)

Keisuke Kikutani is an author at Toshiba (Japan) specializing in microfabrication, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsNanoelectronicsSurface ScienceMicroelectronicsMicrofabricationElectrical Engineering

Publications per year

2008–2008

1

Publications

1

Sub-45 nm SiO<sub>2</sub> Etching with Stacked-Mask Process Using High-Bias-Frequency Dual-Frequency-Superimposed RF Capacitively Coupled Plasma

Keisuke Kikutani, Takashi Ohashi, Akihiro Kojima et al. · Japanese Journal of Applied Physics · 2008 · 17 citations

Electrical Engineering, Engineering, Plasma Processing +13

Rows per page

1–1 of 1