Kentaro Matsunaga is an author at Toshiba (Japan) specializing in engineering, microelectronics, and materials engineering.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMaterials EngineeringNanoelectronicsElectronic PackagingElectrical EngineeringOptoelectronicsSurface Science
Publications per year
1998–2011
8
8
Development of resist material and process for hp-2x-nm devices using EUV lithography
Kentaro Matsunaga, Hiroaki Oizumi, Koji Kaneyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 26 citations
Optical Materials, Engineering, Electron-beam Lithography +19
Rows per page
1–5 of 8