Concepedia

Taku Hirayama

TH

14

Publications

318

Citations

11

H-Index

1994

Active since

Affiliations

Tokyo Ohka Kogyo (Japan)(Current)

Hitachi (Japan)

Association of Super-Advanced Electronics

Kyushu Institute of Technology

University of Hyogo

Taku Hirayama is an author at Tokyo Ohka Kogyo (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1994–2012

14

Publications

14

New Photoresist Based on Amorphous Low Molecular Weight Polyphenols

Taku Hirayama, Daiju Shiono, Hideo Hada et al. · Journal of Photopolymer Science and Technology · 2004 · 62 citations · Full text

, , +14

Spectral analysis of line-edge roughness in polyphenol EB-resists and its impact on transistor performance

Atsuko Yamaguchi, Hiroshi Fukuda, Tadashi Arai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 44 citations

, , +16

Depth Profile and Line-Edge Roughness of Low-Molecular-Weight Amorphous Electron Beam Resists

Taku Hirayama, Daiju Shiono, Shogo Matsumaru et al. · Japanese Journal of Applied Physics · 2005 · 39 citations

, , +14

Performance of molecular resist based on polyphenol in EUV lithography

Hiroaki Oizumi, Fumiaki Kumasaka, Yuusuke Tanaka et al. · Microelectronic Engineering · 2006 · 26 citations

, , +11

Evaluation of New Molecular Resist for EUV Lithography

Hiroaki Oizumi, Yuusuke Tanaka, Takaaki Kumise et al. · Journal of Photopolymer Science and Technology · 2007 · 25 citations · Full text

, , +15

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