Statistics
Publications
5
Citations
105
H-Index
5
Active since
2004
Affiliations
Tokyo Ohka Kogyo (Japan)(Current)
Shogo Matsumaru is an author at Tokyo Ohka Kogyo (Japan) specializing in natural sciences, line-edge roughness, and materials science.
Publications per year
2004–2016
5
5
Patterning performance of chemically amplified resist in EUV lithography
Tatsuya Fujii, Shogo Matsumaru, Tomotaka Yamada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations
Engineering, Manufacturing Engineering, Materials Science +13
Toshiki Hagiwara, Shogo Matsumaru, Yasushi Okada et al. · Journal of Polymer Science Part A Polymer Chemistry · 2006 · 12 citations · Full text
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