21
Publications
1.6K
Citations
13
H-Index
1990
Active since
Tomoyuki Ando is an author at Tokyo Ohka Kogyo (Japan) specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceChemistryApplied PhysicsPolymer SciencePolymer ChemistryMicroelectronicsMicrofabricationChemical EngineeringElectronic Packaging
Publications per year
1990–2018
21
21
Proton Dynamics in Chemically Amplified Electron Beam Resists
Hiroki Yamamoto, Takahiro Kozawa, Atsuro Nakano et al. · Japanese Journal of Applied Physics · 2004 · 179 citations
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1–5 of 21