Concepedia

Daiju Shiono

DS

Statistics

Publications

15

Citations

326

H-Index

11

Active since

2004

Affiliations

Tokyo Ohka Kogyo (Japan)(Current)

Hitachi (Japan)

University of Hyogo

Association of Super-Advanced Electronics

Tokyo Institute of Technology

Daiju Shiono is an author at Tokyo Ohka Kogyo (Japan) specializing in materials engineering, natural sciences, and materials science.

Publications per year

2004–2014

15

Publications

15

New Photoresist Based on Amorphous Low Molecular Weight Polyphenols

Taku Hirayama, Daiju Shiono, Hideo Hada et al. · Journal of Photopolymer Science and Technology · 2004 · 62 citations · Full text

, , +12

Spectral analysis of line-edge roughness in polyphenol EB-resists and its impact on transistor performance

Atsuko Yamaguchi, Hiroshi Fukuda, Tadashi Arai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 44 citations

, , +17

Depth Profile and Line-Edge Roughness of Low-Molecular-Weight Amorphous Electron Beam Resists

Taku Hirayama, Daiju Shiono, Shogo Matsumaru et al. · Japanese Journal of Applied Physics · 2005 · 39 citations

, , +17

Performance of molecular resist based on polyphenol in EUV lithography

Hiroaki Oizumi, Fumiaki Kumasaka, Yuusuke Tanaka et al. · Microelectronic Engineering · 2006 · 28 citations

, , +9

Evaluation of New Molecular Resist for EUV Lithography

Hiroaki Oizumi, Yuusuke Tanaka, Takaaki Kumise et al. · Journal of Photopolymer Science and Technology · 2007 · 25 citations · Full text

, , +13

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