Concepedia

Fumiaki Kumasaka

FK

8

Publications

157

Citations

8

H-Index

1996

Active since

Affiliations

Fujitsu (Japan)(Current)

Association of Super-Advanced Electronics

Fumiaki Kumasaka is an author at Fujitsu (Japan) specializing in materials science, engineering, and applied physics.

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Publications per year

1996–2021

8

Publications

8

Lithographic performance of high-numerical-aperture (NA=0.3) EUV small-field exposure tool (HINA)

Hiroaki Oizumi, Yusuke Tanaka, Fumiaki Kumasaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 36 citations

Performance of molecular resist based on polyphenol in EUV lithography

Hiroaki Oizumi, Fumiaki Kumasaka, Yuusuke Tanaka et al. · Microelectronic Engineering · 2006 · 26 citations

, , +11

Microstructure and Dielectric Properties of Composite Films for Embedded Capacitor Applications

Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka · International Journal of Applied Ceramic Technology · 2010 · 19 citations

An artificial photosynthesis anode electrode composed of a nanoparticulate photocatalyst film in a visible light responsive GaN-ZnO solid solution system

Yoshihiko Imanaka, Toshihisa Anazawa, Toshio Manabe et al. · Scientific Reports · 2016 · 19 citations · Full text

Nanoparticulated Dense and Stress‐<scp>F</scp>ree Ceramic Thick Film for Material Integration

Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka et al. · Advanced Engineering Materials · 2013 · 16 citations

, , +16

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