Fumiaki Kumasaka - Concepedia

Author

Fumiaki Kumasaka

Fujitsu (Japan)

Also Known As

F. Kumasaka, Fumiaki KUMASAKA, Fumiaki Kumasaka

Publications

219

Citations

H-Index

Concepts

All Affiliations

Fujitsu (Japan)Association of Super-Advanced Electronics

About

Fumiaki Kumasaka is an author at Fujitsu (Japan) specializing in materials science, engineering, and applied physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	69
2	Applied Physics	4	4	69
3	Materials Engineering	2	2	40
4	Chemical Engineering	1	1	13
5	Electrical Engineering	1	1	13

Fumiaki Kumasaka

Publications

157

Citations

H-Index

Page 1

	Year	Citations
Lithographic performance of high-numerical-aperture (NA=0.3) EUV small-field exposure tool (HINA) Hiroaki Oizumi, Yusuke Tanaka, Fumiaki Kumasaka, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2005	36
Performance of molecular resist based on polyphenol in EUV lithography Hiroaki Oizumi, Fumiaki Kumasaka, Yuusuke Tanaka, Microelectronic Engineering Materials EngineeringMaterials ScienceEngineeringSpecific ResistanceElectron-beam Lithography	2006	26
Microstructure and Dielectric Properties of Composite Films for Embedded Capacitor Applications Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka International Journal of Applied Ceramic Technology	2010	19
An artificial photosynthesis anode electrode composed of a nanoparticulate photocatalyst film in a visible light responsive GaN-ZnO solid solution system Yoshihiko Imanaka, Toshihisa Anazawa, Toshio Manabe, Scientific Reports	2016	19
Nanoparticulated Dense and Stress‐<scp>F</scp>ree Ceramic Thick Film for Material Integration Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka, Advanced Engineering Materials EngineeringMechanical EngineeringCeramic PowdersCu FoilMaterials Fabrication	2013	16
Precise Stress Control of Ta Absorber using Low Stress Alumina Etching Mask for X-Ray Mask Fabrication Yoshihisa Iba, Fumiaki Kumasaka, Hajime Aoyama, Japanese Journal of Applied Physics Materials ScienceMaterials EngineeringOxygen ConcentrationEngineeringPrecise Stress Control	1996	14
Optimization of the composition in a composite material for microelectronics application using the Ising model Yoshihiko Imanaka, Toshihisa Anazawa, Fumiaki Kumasaka, Scientific Reports	2021	14
Dielectric and Insulating Properties of Embedded Capacitor for Flexible Electronics Prepared by Aerosol-Type Nanoparticle Deposition Yoshihiko Imanaka, Hideyuki Amada, Fumiaki Kumasaka Japanese Journal of Applied Physics Aerosol-type Nanoparticle DepositionEngineeringHybrid CapacitorMaterial InnovationInsulating Properties	2013	13

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