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Tomotaka Yamada

TY

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Publications

1

Citations

25

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1

Active since

2016

Affiliations

Tokyo Ohka Kogyo (Japan)(Current)

Tomotaka Yamada is an author at Tokyo Ohka Kogyo (Japan) specializing in materials engineering, electronic packaging, and microfabrication.

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Publications per year

2016–2016

1

Publications

1

Patterning performance of chemically amplified resist in EUV lithography

Tatsuya Fujii, Shogo Matsumaru, Tomotaka Yamada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

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