Yunpeng Yin

Integration of EUV lithography in the fabrication of 22-nm node devices

Obert R. Wood, Chiew-Seng Koay, Karen Petrillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 51 citations · Full text

Engineering, Electrical Engineering, Materials Science +16

The use of EUV lithography to produce demonstration devices

Bruno LaFontaine, Yunfei Deng, Ryoung-Han Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 42 citations

Engineering, Electrical Engineering, Manufacturing Engineering +15

Surface roughening of silicon, thermal silicon dioxide, and low-k dielectric coral films in argon plasma

Yunpeng Yin, Herbert H. Sawin · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2008 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +17

Insertion strategy for EUV lithography

Obert R. Wood, John Arnold, Timothy A. Brunner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 31 citations

Engineering, Electrical Engineering, Manufacturing Engineering +12

Improved A* algorithm and model predictive control- based path planning and tracking framework for hexapod robots

Zelin Wang, Feng Gao, Yue Zhao et al. · Industrial Robot the international journal of robotics research and application · 2022 · 25 citations

Engineering, Mechanical Engineering, Robotics Engineering +17