Statistics
Publications
8
Citations
153
H-Index
8
Active since
1998
Affiliations
Steven Scheer is an author at Tokyo Electron (Japan) specializing in engineering, microfabrication, and electronic materials.
Publications per year
1998–2017
8
8
65nm cmos technology for low power applications
An Steegen, R. Mo, R. Mann et al. · 2006 · 44 citations
Engineering, Computer Engineering, Electrical Engineering +17
Advances and challenges in dual-tone development process optimization
Carlos Fonseca, Mark Somervell, Steven Scheer et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 20 citations
Engineering, Electrical Engineering, Manufacturing Engineering +10
EUV RLS performance tradeoffs for a polymer bound PAG resist
Roel Gronheid, Alessandro Vaglio Pret, Benjamen M. Rathsack et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations
Natural Sciences, Materials Engineering, Materials Science +17
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