Statistics
Publications
11
Citations
147
H-Index
10
Active since
1999
Affiliations
Noriaki Nakayamada is an author at Toshiba (Japan) specializing in engineering, microelectronics, and electron beam mask writing.
Publications per year
1999–2023
11
11
Modeling of charging effect and its correction by EB mask writer EBM-6000
Noriaki Nakayamada, Seiji Wake, Takashi Kamikubo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 17 citations
Engineering, Electrical Engineering, Electronic Materials +8
EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
Electron beam mask writer EBM-9500 for logic 7nm node generation
Hideki Matsui, Takashi Kamikubo, Satoshi Nakahashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +14
1–5 of 11