Concepedia

Haruyuki Nomura

HN

2

Publications

29

Citations

2

H-Index

2016

Active since

Haruyuki Nomura is an author specializing in applied physics, electrical engineering, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationIntegrated CircuitsComputer EngineeringElectrical EngineeringInstrumentationNanolithographyMicroelectronicsSynchrotron Radiation

Publications per year

2016–2023

2

Publications

2

Recent progress and future of electron multi-beam mask writer

Jumpei Yasuda, Haruyuki Nomura, Hiroshi Matsumoto et al. · Japanese Journal of Applied Physics · 2023 · 17 citations · Full text

Electrical Engineering, Engineering, Electron-beam Lithography +12

Electron beam mask writer EBM-9500 for logic 7nm node generation

Hideki Matsui, Takashi Kamikubo, Satoshi Nakahashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations

Nano Imprint Lithography, Electrical Engineering, Engineering +15

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