Statistics
Publications
1
Citations
13
H-Index
1
Active since
2016
Hideki Matsui is an author specializing in electrical engineering, electron beam lithography masks, and engineering.
Publications per year
2016–2016
1
1
Electron beam mask writer EBM-9500 for logic 7nm node generation
Hideki Matsui, Takashi Kamikubo, Satoshi Nakahashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 13 citations
Engineering, Electrical Engineering, Manufacturing Engineering +14
1–1 of 1