1
Publications
12
Citations
1
H-Index
2016
Active since
Satoshi Nakahashi is an author specializing in microfabrication, engineering, and applied physics.
Top concepts
EngineeringApplied PhysicsNanolithographyMicroelectronicsMicrofabricationIntegrated CircuitsComputer EngineeringElectrical Engineering
Publications per year
2016–2016
1
1
Electron beam mask writer EBM-9500 for logic 7nm node generation
Hideki Matsui, Takashi Kamikubo, Satoshi Nakahashi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations
Nano Imprint Lithography, Electrical Engineering, Engineering +15
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