Concepedia

Takahito Nakayama

TN

Statistics

Publications

3

Citations

50

H-Index

3

Active since

1989

Takahito Nakayama is an author specializing in electron beam optics, device fabrication, and microfabrication.

Publications per year

1989–2014

3

Publications

3

Determination of picogram quantities of rare-earth elements in meteoritic materials by direct-loading thermal ionization mass spectrometry

Nobaru. Nakamura, Koshi Yamamoto, Shinji Noda et al. · Analytical Chemistry · 1989 · 23 citations

Natural Sciences, Chemistry, Earth Sciences +11

EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond

Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond

Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

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