Statistics
Publications
2
Citations
27
H-Index
2
Active since
2014
Hidekazu Takekoshi is an author specializing in electron beam mask writing, device fabrication, and microfabrication.
Publications per year
2014–2014
2
2
EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
EBM-9000: EB mask writer for product mask fabrication of 16nm half-pitch generation and beyond
Hidekazu Takekoshi, Takahito Nakayama, Kenichi Saito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
1–2 of 2