I. Kawanabe

Dependence of thin-oxide films quality on surface microroughness

T. Ohmi, M. Miyashita, M. Itano et al. · IEEE Transactions on Electron Devices · 1992 · 300 citations

Materials Science, Electrical Engineering, Engineering +13

Principles of wet chemical processing in ULSI microfabrication

H. Kikyuama, Nobuhiko Miki, K. Saka et al. · IEEE Transactions on Semiconductor Manufacturing · 1991 · 89 citations

Engineering, Chemical Composition, Wetting +17

Gas-phase selective etching of native oxide

Nobuhiko Miki, H. Kikuyama, I. Kawanabe et al. · IEEE Transactions on Electron Devices · 1990 · 79 citations

Materials Engineering, Materials Science, Chemical Engineering +15

Etching Rate and Mechanism of Doped Oxide in Buffered Hydrogen Fluoride Solution

H. Kikuyama, Minoru Waki, I. Kawanabe et al. · Journal of The Electrochemical Society · 1992 · 44 citations

Materials Engineering, Materials Science, Chemical Engineering +13

Dependence of Thin Oxide Films Quality on Surface Micro-Roughness

M. Miyashita, M. Itano, Takashi Imaoka et al. · 1991 · 43 citations

Engineering, Surface Micro-roughness, Ulsi Devices +16