M. Miyashita

Dependence of thin-oxide films quality on surface microroughness

T. Ohmi, M. Miyashita, M. Itano et al. · IEEE Transactions on Electron Devices · 1992 · 303 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Dependence of electron channel mobility on Si-SiO/sub 2/ interface microroughness

T. Ohmi, Kazuhiko Kotani, Akinobu Teramoto et al. · IEEE Electron Device Letters · 1991 · 170 citations

Engineering, Electrical Engineering, Materials Science +16

Particle removal from silicon wafer surface in wet cleaning process

M. Itano, Frederick W. Kern, M. Miyashita et al. · IEEE Transactions on Semiconductor Manufacturing · 1993 · 113 citations · Full text

Engineering, Materials Engineering, Materials Science +17

A New and Efficient Esterification Reaction via Mixed Anhydrides by the Promotion of a Catalytic Amount of Lewis Acid

M. Miyashita, Isamu Shiina, So Miyoshi et al. · Bulletin of the Chemical Society of Japan · 1993 · 93 citations

Natural Sciences, Chemistry, Catalysis +12

Principles of wet chemical processing in ULSI microfabrication

H. Kikyuama, Nobuhiko Miki, K. Saka et al. · IEEE Transactions on Semiconductor Manufacturing · 1991 · 89 citations

Engineering, Materials Engineering, Materials Science +17