Concepedia

H. Kikyuama

HK

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Publications

1

Citations

89

H-Index

1

Active since

1991

Affiliations

Tohoku University(Current)

H. Kikyuama is an author at Tohoku University specializing in microfabrication, chemical engineering, and microfluidics.

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Publications per year

1991–1991

1

Publications

1

Principles of wet chemical processing in ULSI microfabrication

H. Kikyuama, Nobuhiko Miki, K. Saka et al. · IEEE Transactions on Semiconductor Manufacturing · 1991 · 89 citations

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