Concepedia

K. Saka

KS

2

Publications

123

Citations

2

H-Index

1990

Active since

Affiliations

Hashimoto Municipal Hospital(Current)

Tohoku University

K. Saka is an author at Hashimoto Municipal Hospital specializing in chemical engineering, interfacial phenomena, and surface science.

Top concepts

Publications per year

1990–1991

2

Publications

2

Principles of wet chemical processing in ULSI microfabrication

H. Kikyuama, Nobuhiko Miki, K. Saka et al. · IEEE Transactions on Semiconductor Manufacturing · 1991 · 89 citations

, , +17

Surface active buffered hydrogen fluoride having excellent wettability for ULSI processing

H. Kikuyama, Nobuhiko Miki, K. Saka et al. · IEEE Transactions on Semiconductor Manufacturing · 1990 · 34 citations

, , +21

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