M. Itano

Dependence of thin-oxide films quality on surface microroughness

T. Ohmi, M. Miyashita, M. Itano et al. · IEEE Transactions on Electron Devices · 1992 · 300 citations

Materials Science, Electrical Engineering, Engineering +13

Particle removal from silicon wafer surface in wet cleaning process

M. Itano, Frederick W. Kern, M. Miyashita et al. · IEEE Transactions on Semiconductor Manufacturing · 1993 · 113 citations

Engineering, Surface Nanotechnology, Mineral Processing +17

Dependence of Thin Oxide Films Quality on Surface Micro-Roughness

M. Miyashita, M. Itano, Takashi Imaoka et al. · 1991 · 43 citations

Engineering, Surface Micro-roughness, Ulsi Devices +16

Minimization of Particle Contamination during Wet Processing of Si Wafers

M. Itano, Takehiko Kezuka, Miho Ishii et al. · Journal of The Electrochemical Society · 1995 · 39 citations

Particle Deposition, Engineering, Surface Nanotechnology +21

Comparative Studies of Perfluorocarbon Alternative Gas Plasmas for Contact Hole Etch

Shingo Nakamura, M. Itano, Hirokazu Aoyama et al. · Japanese Journal of Applied Physics · 2003 · 38 citations

Chemical Engineering, Engineering, Fluorocarbon Polymers +12