Motohiro Shiratani - Concepedia

Author

Motohiro Shiratani

Also Known As

Motohiro Shiratani

Publications

117

Citations

H-Index

Concepts

All Affiliations

Motohiro Shiratani is an author at JSR (Japan) specializing in electronic packaging, materials engineering, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	93
2	Applied Physics	5	5	93
3	Materials Engineering	5	5	93
4	Electrical Engineering	4	4	81
5	Chemical Engineering	1	1	12

Motohiro Shiratani

Publications

Citations

H-Index

Page 1

	Year	Citations
Novel EUV resist development for sub-14nm half pitch Masafumi Hori, Takehiko Naruoka, Hisashi Nakagawa, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE High ResolutionEngineeringElectron-beam LithographyExtreme UltravioletWafer Scale Processing	2015	25
Novel EUV Resist Development for Sub-14nm Half Pitch Takakazu Kimoto, Takehiko Naruoka, Hisashi Nakagawa, Journal of Photopolymer Science and Technology High ResolutionEngineeringElectron-beam LithographyExtreme UltravioletWafer Scale Processing	2015	24
Novel EUV resist materials for 16nm half pitch and EUV resist defects Motohiro Shiratani, Takehiko Naruoka, Ken Maruyama, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyFluorine UnitsDefect ToleranceExtreme Ultraviolet	2014	19
Novel EUV resist materials and process for 20 nm half pitch and beyond Ken Maruyama, Ramakrishnan Ayothi, Yoshi Hishiro, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyResistorBeam LithographyNanoelectronics	2013	13
Novel metal containing resists for EUV lithography extendibility Danilo De Simone, Şafak Sayan, Satoshi Dei, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Effective UseEngineeringElectron-beam LithographyLithography PhotoresistsExtreme Ultraviolet	2016	12

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