Concepedia

Motohiro Shiratani

MS

5

Publications

93

Citations

5

H-Index

2013

Active since

Affiliations

JSR (Japan)(Current)

Micron (United States)

Motohiro Shiratani is an author at JSR (Japan) specializing in electronic packaging, materials engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectronic PackagingMaterials EngineeringNanoelectronicsSurface ScienceMicrofabricationElectrical Engineering

Publications per year

2013–2016

5

Publications

5

Novel EUV resist development for sub-14nm half pitch

Masafumi Hori, Takehiko Naruoka, Hisashi Nakagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 25 citations

High Resolution, Engineering, Electron-beam Lithography +19

Novel EUV Resist Development for Sub-14nm Half Pitch

Takakazu Kimoto, Takehiko Naruoka, Hisashi Nakagawa et al. · Journal of Photopolymer Science and Technology · 2015 · 24 citations · Full text

High Resolution, Engineering, Electron-beam Lithography +19

Novel EUV resist materials for 16nm half pitch and EUV resist defects

Motohiro Shiratani, Takehiko Naruoka, Ken Maruyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Engineering, Electron-beam Lithography, Fluorine Units +21

Novel EUV resist materials and process for 20 nm half pitch and beyond

Ken Maruyama, Ramakrishnan Ayothi, Yoshi Hishiro et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 13 citations

Engineering, Electron-beam Lithography, Resistor +18

Novel metal containing resists for EUV lithography extendibility

Danilo De Simone, Şafak Sayan, Satoshi Dei et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 12 citations

Effective Use, Engineering, Electron-beam Lithography +16

Rows per page

1–5 of 5