Concepedia

Author

Masafumi Hori

JSR (Japan)

Also Known As

Masafumi HORI, Masafumi Hori

27

Publications

299

Citations

8

H-Index

26

Concepts

All Affiliations

JSR (Japan)IMECMicron (United States)
MH

About

Masafumi Hori is an author at JSR (Japan) specializing in applied physics, microfabrication, and engineering.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

5

5

137

2

Applied Physics

5

5

137

3

Materials Engineering

3

3

103

4

Electrical Engineering

2

2

49

5

Natural Sciences

1

1

24

Masafumi Hori

×

7

Publications

234

Citations

7

H-Index

YearCitations

Reversible Control of Hydrogenation of a Single Molecule

Satoshi Katano, Yousoo Kim, Masafumi Hori,

Science

2007

80

Sub-40-nm half-pitch double patterning with resist freezing process

Masafumi Hori, Tomoki Nagai, Atsushi Nakamura,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2008

54

Novel EUV resist development for sub-14nm half pitch

Masafumi Hori, Takehiko Naruoka, Hisashi Nakagawa,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2015

25

Novel EUV Resist Development for Sub-14nm Half Pitch

Takakazu Kimoto, Takehiko Naruoka, Hisashi Nakagawa,

Journal of Photopolymer Science and Technology

2015

24

Double patterning process with freezing technique

Goji Wakamatsu, Yusuke Anno, Masafumi Hori,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2009

24

Challenge toward breakage of RLS trade-off for EUV lithography by Photosensitized Chemically Amplified Resist (PSCAR) with flood exposure

Seiji Nagahara, Michael Carcasi, Hisashi Nakagawa,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2016

17

Via patterning in the 7-nm node using immersion lithography and graphoepitaxy directed self-assembly

Jan Doise, Joost Bekaert, Boon Teik Chan,

Journal of Micro/Nanolithography MEMS and MOEMS

2017

10

Page 1