Masafumi Hori

Reversible Control of Hydrogenation of a Single Molecule

Satoshi Katano, Yousoo Kim, Masafumi Hori et al. · Science · 2007 · 80 citations

Sub-40-nm half-pitch double patterning with resist freezing process

Masafumi Hori, Tomoki Nagai, Atsushi Nakamura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 54 citations

Engineering, Electron-beam Lithography, Pattern Transfer +16

Novel EUV resist development for sub-14nm half pitch

Masafumi Hori, Takehiko Naruoka, Hisashi Nakagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 25 citations

High Resolution, Engineering, Electron-beam Lithography +19

Novel EUV Resist Development for Sub-14nm Half Pitch

Takakazu Kimoto, Takehiko Naruoka, Hisashi Nakagawa et al. · Journal of Photopolymer Science and Technology · 2015 · 24 citations · Full text

High Resolution, Engineering, Electron-beam Lithography +19

Double patterning process with freezing technique

Goji Wakamatsu, Yusuke Anno, Masafumi Hori et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 24 citations

Numerical Analysis, Engineering, Electron-beam Lithography +19