Concepedia
Statistics
Publications
10
Citations
198
H-Index
Active since
2003
Affiliations
JSR (Japan)(Current)
The University of Osaka
Tokyo Electron (Japan)
Paul Scherrer Institute
IMEC
Takehiko Naruoka is an author at JSR (Japan) specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsMicrofabricationElectrical EngineeringNanoelectronicsOptoelectronicsElectronic PackagingMaterials Engineering
Publications per year
2003–2016
Recent EUV Resists toward High Volume Manufacturing
Hisashi Nakagawa, Takehiko Naruoka, Tomoki Nagai · Journal of Photopolymer Science and Technology · 2014 · 25 citations · Full text
Short Wavelength Optic, Engineering, Electron-beam Lithography +16
Novel EUV resist development for sub-14nm half pitch
Masafumi Hori, Takehiko Naruoka, Hisashi Nakagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 25 citations
High Resolution, Engineering, Electron-beam Lithography +19
Novel EUV Resist Development for Sub-14nm Half Pitch
Takakazu Kimoto, Takehiko Naruoka, Hisashi Nakagawa et al. · Journal of Photopolymer Science and Technology · 2015 · 24 citations · Full text
Regulation of Main-Chain Conformation of Permethyldecasilane by Complexation with γ-Cyclodextrin
Kenkichi Sakamoto, Takehiko Naruoka, Mitsuo Kira · Chemistry Letters · 2003 · 21 citations
Inclusion Complex, Engineering, Biochemistry +13
Sensitivity enhancement of chemically amplified resists and performance study using extreme ultraviolet interference lithography
Elizabeth Buitrago, Seiji Nagahara, Oktay Yildirim et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 21 citations · Full text
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