Elizabeth Buitrago

Improvements in resist performance towards EUV HVM

Oktay Yildirim, Elizabeth Buitrago, Rik Hoefnagels et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 62 citations · Full text

Electrical Engineering, Engineering, Specific Resistance +14

Sensing with Advanced Computing Technology: Fin Field-Effect Transistors with High-k Gate Stack on Bulk Silicon

Sara Rigante, Paolo Scarbolo, Mathias Wipf et al. · ACS Nano · 2015 · 61 citations · Full text

RF MEMS Shunt Capacitive Switches Using AlN Compared to $\hbox{Si}_{3}\hbox{N}_{4}$ Dielectric

Montserrat Fernández-Bolaños Badía, Elizabeth Buitrago, Adrian Ionescu · Journal of Microelectromechanical Systems · 2012 · 53 citations · Full text

Electrical Engineering, Aluminum Nitride, Engineering +12

Low-line edge roughness extreme ultraviolet photoresists of organotin carboxylates

Ryan Del Re, James Passarelli, Miriam Sortland et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 53 citations · Full text

Materials Science, Organic Material Chemistry, Optical Materials +15

Junctionless silicon nanowire transistors for the tunable operation of a highly sensitive, low power sensor

Elizabeth Buitrago, Giorgos Fagas, Montserrat Fernández-Bolaños Badía et al. · Sensors and Actuators B Chemical · 2013 · 50 citations · Full text

Electrical Engineering, Engineering, Nanoelectronics +7