Concepedia

Author

Seiji Nagahara

Tokyo Electron (Japan)

Also Known As

S. Nagahara, SEIJI NAGAHARA, Seiji Nagahara

74

Publications

743

Citations

14

H-Index

61

Concepts

All Affiliations

Tokyo Electron (Japan)The University of OsakaPaul Scherrer InstituteASML (Netherlands)IMEC
SN

About

Seiji Nagahara is an author at Tokyo Electron (Japan) specializing in engineering, applied physics, and microelectronics.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

12

14

500

2

Applied Physics

10

10

316

3

Chemical Engineering

5

5

293

4

Health Sciences

1

1

104

5

Natural Sciences

1

1

17

Seiji Nagahara

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19

Publications

592

Citations

14

H-Index

YearCitations

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