Seiji Nagahara

Radiation and photochemistry of onium salt acid generators in chemically amplified resists

Seiichi Tagawa, Seiji Nagahara, T. Iwamoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 131 citations

Natural Sciences, Chemical Engineering, Chemistry +17

Radiation-induced reactions of chemically amplified x-ray and electron-beam resists based on deprotection of t-butoxycarbonyl groups

Takahiro Kozawa, Seiji Nagahara, Yuichi Yoshida et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 104 citations

Natural Sciences, Chemical Engineering, Chemistry +17

Pattern scaling with directed self assembly through lithography and etch process integration

Benjamen M. Rathsack, Mark Somervell, Josh Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 53 citations

Engineering, Materials Engineering, Materials Science +16

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Advances in directed self assembly integration and manufacturability at 300 mm

Benjamen M. Rathsack, Mark Somervell, Makato Muramatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +15