Concepedia

Masahiro Kanno

MK

Statistics

Publications

9

Citations

202

H-Index

9

Active since

1991

Affiliations

Toshiba (Japan)(Current)

Tokyo Electron (Japan)

Kyoto University

Masahiro Kanno is an author at Toshiba (Japan) specializing in engineering, microfabrication, and applied physics.

Top concepts

EngineeringMicrofabricationSelf-assemblyApplied PhysicsMaterial SciencePolymer ScienceMechanical Engineering3D PrintingMicroelectronicsElectronic Packaging

Publications per year

1991–2022

9

Publications

9

Contact hole shrink process using graphoepitaxial directed self-assembly lithography

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text

Engineering, Electron-beam Lithography, Wet Development Process +18

Atomic Force Microscopic Observation of Mechanically Traumatized Erythrocytes

Yuji Ohta, Hiroshi Okamoto, Masahiro Kanno et al. · Artificial Organs · 2002 · 30 citations

Mechanobiology, Animal Physiology, Soft Tissue Injury +15

Sub-30nm via interconnects fabricated using directed self-assembly

Hirokazu Kato, Yuriko Seino, Hiroki Yonemitsu et al. · Microelectronic Engineering · 2013 · 24 citations

Electrical Engineering, Wafer Scale Processing, Engineering +8

Contact hole shrink process using directed self-assembly

Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations

Engineering, Mechanical Engineering, Wet Development Process +17

Correlated Rattling of Sodium‐Chains Suppressing Thermal Conduction in Thermoelectric Stannides

Takahiro Yamada, Masato Yoshiya, Masahiro Kanno et al. · Advanced Materials · 2022 · 21 citations · Full text

Engineering, Thermoelectric Stannides, Tunnel Frameworks +16

Rows per page

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