Concepedia
Statistics
Publications
9
Citations
202
H-Index
Active since
1991
Affiliations
Toshiba (Japan)(Current)
Tokyo Electron (Japan)
Kyoto University
Masahiro Kanno is an author at Toshiba (Japan) specializing in engineering, microfabrication, and applied physics.
Top concepts
EngineeringMicrofabricationSelf-assemblyApplied PhysicsMaterial SciencePolymer ScienceMechanical Engineering3D PrintingMicroelectronicsElectronic Packaging
Publications per year
1991–2022
Contact hole shrink process using graphoepitaxial directed self-assembly lithography
Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 48 citations · Full text
Engineering, Electron-beam Lithography, Wet Development Process +18
Atomic Force Microscopic Observation of Mechanically Traumatized Erythrocytes
Yuji Ohta, Hiroshi Okamoto, Masahiro Kanno et al. · Artificial Organs · 2002 · 30 citations
Mechanobiology, Animal Physiology, Soft Tissue Injury +15
Sub-30nm via interconnects fabricated using directed self-assembly
Hirokazu Kato, Yuriko Seino, Hiroki Yonemitsu et al. · Microelectronic Engineering · 2013 · 24 citations
Electrical Engineering, Wafer Scale Processing, Engineering +8
Contact hole shrink process using directed self-assembly
Yuriko Seino, Hiroki Yonemitsu, Masahiro Kanno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 22 citations
Engineering, Mechanical Engineering, Wet Development Process +17
Correlated Rattling of Sodium‐Chains Suppressing Thermal Conduction in Thermoelectric Stannides
Takahiro Yamada, Masato Yoshiya, Masahiro Kanno et al. · Advanced Materials · 2022 · 21 citations · Full text
Engineering, Thermoelectric Stannides, Tunnel Frameworks +16
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