Concepedia
1
Publications
26
Citations
H-Index
2013
Active since
Affiliations
Tokyo Electron (Japan)(Current)
Makato Muramatsu is an author at Tokyo Electron (Japan).
Publications per year
2013–2013
Advances in directed self assembly integration and manufacturability at 300 mm
Benjamen M. Rathsack, Mark Somervell, Makato Muramatsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 26 citations
Rows per page
1–1 of 1