18
Publications
504
Citations
15
H-Index
2005
Active since
Hisashi Nakagawa is an author at Tokyo Electron (Japan) specializing in engineering, materials science, and chemical engineering.
Top concepts
EngineeringMaterial ScienceApplied PhysicsChemical EngineeringMicroelectronicsOptoelectronicsMicrofabricationMaterials EngineeringElectrical EngineeringChemistry
Publications per year
2005–2019
18
18
Rows per page
1–5 of 18