Concepedia

Goji Wakamatsu

GW

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Publications

2

Citations

34

H-Index

2

Active since

2009

Affiliations

JSR (Japan)(Current)

Goji Wakamatsu is an author at JSR (Japan) specializing in microelectronics, materials science, and applied physics.

Top concepts

Publications per year

2009–2012

2

Publications

2

Double patterning process with freezing technique

Goji Wakamatsu, Yusuke Anno, Masafumi Hori et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 24 citations

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Investigation of pattern wiggling for spin-on organic hardmask materials

Goji Wakamatsu, Kentaro Goto, Yoshi Hishiro et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 10 citations

, , +18

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