Concepedia

Yoshi Hishiro

YH

Statistics

Publications

7

Citations

120

H-Index

7

Active since

2012

Affiliations

Micron (United States)(Current)

Yoshi Hishiro is an author at Micron (United States) specializing in materials engineering, applied physics, and electronic packaging.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsElectronic PackagingMaterials EngineeringMicrofabricationElectrical EngineeringNanoelectronics

Publications per year

2012–2015

7

Publications

7

Novel EUV resist development for sub-14nm half pitch

Masafumi Hori, Takehiko Naruoka, Hisashi Nakagawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 25 citations

High Resolution, Engineering, Electron-beam Lithography +19

Novel EUV Resist Development for Sub-14nm Half Pitch

Takakazu Kimoto, Takehiko Naruoka, Hisashi Nakagawa et al. · Journal of Photopolymer Science and Technology · 2015 · 24 citations · Full text

High Resolution, Engineering, Electron-beam Lithography +19

Novel EUV resist materials for 16nm half pitch and EUV resist defects

Motohiro Shiratani, Takehiko Naruoka, Ken Maruyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 19 citations

Engineering, Electron-beam Lithography, Fluorine Units +21

EUV resist development for 16nm half pitch

Ken Maruyama, Hiroki Nakagawa, Shalini Sharma et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 16 citations

High Resolution, Engineering, Electron-beam Lithography +17

Key parameters of EUV resists for contact hole applications

Kyoungyong Cho, Hiroki Nakagawa, Ken Maruyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 13 citations

Engineering, Electron-beam Lithography, Resistor +17

1–5 of 7