19
Publications
498
Citations
13
H-Index
1998
Active since
Affiliations
Ken Maruyama is an author at Kanagawa University specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsChemistryMicroelectronicsSurface ScienceElectrical EngineeringPolymer SciencePhotochemistryPolymer Chemistry
Publications per year
1998–2023
19
19
Hiroto Kudo, Daisuke Watanabe, Tadatomi Nishikubo et al. · Journal of Materials Chemistry · 2008 · 56 citations
Materials Science, Water-wheel-like Cyclic Oligomer, Chemical Engineering +15
Progress in EUV Resist Development
Daisuke Shimizu, Ken Maruyama, Akio Saitou et al. · Journal of Photopolymer Science and Technology · 2007 · 42 citations · Full text
Engineering, Electron-beam Lithography, Resist Formulation +17
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