Concepedia

Akio Saitou

AS

1

Publications

42

Citations

1

H-Index

2007

Active since

Affiliations

Association of Super-Advanced Electronics(Current)

Akio Saitou is an author at Association of Super-Advanced Electronics specializing in electrical engineering, microelectronics, and mechanical engineering.

Top concepts

EngineeringApplied PhysicsPolymer ScienceMaterial ScienceMicroelectronicsMicrofabricationFlexible ElectronicsElectrical EngineeringMechanical Engineering

Publications per year

2007–2007

1

Publications

1

Progress in EUV Resist Development

Daisuke Shimizu, Ken Maruyama, Akio Saitou et al. · Journal of Photopolymer Science and Technology · 2007 · 42 citations · Full text

Engineering, Electron-beam Lithography, Resist Formulation +17

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