Concepedia
Statistics
Publications
9
Citations
218
H-Index
Active since
2007
Affiliations
Samsung (South Korea)(Current)
Cornell University
University at Albany, State University of New York
Kyoungyong Cho is an author at Samsung (South Korea) specializing in engineering, microfabrication, and microelectronics.
Top concepts
EngineeringMicroelectronicsMicrofabricationApplied PhysicsMaterial ScienceElectronic PackagingElectrical EngineeringComputer Engineering3D MemoryChemistry
Publications per year
2007–2013
A new inorganic EUV resist with high-etch resistance
Markos Trikeriotis, Marie Krysak, Yeon Sook Chung et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 67 citations
A New Capacitorless 1T DRAM Cell: Surrounding Gate MOSFET With Vertical Channel (SGVC Cell)
Hoon Jeong, Ki‐Whan Song, Il Han Park et al. · IEEE Transactions on Nanotechnology · 2007 · 47 citations
Non-volatile Memory, Electrical Engineering, Sgvc Cell +14
Non-aqueous negative-tone development of inorganic metal oxide nanoparticle photoresists for next generation lithography
Christine Ouyang, Yeon Sook Chung, Li Li et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 21 citations
Engineering, Electron-beam Lithography, Inorganic Photochemistry +23
The Physics of EUV Photoresist and How It Drives Strategies for Improvement
Mark Neisser, Kyoungyong Cho, Karen Petrillo · Journal of Photopolymer Science and Technology · 2012 · 18 citations · Full text
Materials Science, Engineering, Electron-beam Lithography +15
The analysis of EUV mask defects using a wafer defect inspection system
Kyoungyong Cho, Joo-On Park, Chang-Min Park et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 15 citations
Electrical Engineering, Wafer Scale Processing, Engineering +14
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