R. Schmolke

The impact of nitrogen on the defect aggregation in silicon

Wilfried von Ammon, R. Hölzl, J. Virbulis et al. · Journal of Crystal Growth · 2001 · 93 citations

Natural Sciences, Materials Engineering, Materials Science +12

Characterization of Crystal Quality by Crystal Originated Particle Delineation and the Impact on the Silicon Wafer Surface

D. Gräf, M. Suhren, U. Lambert et al. · Journal of The Electrochemical Society · 1998 · 42 citations

Engineering, Materials Engineering, Materials Science +17

High Resolution Structure Imaging of Octahedral Void Defects in As-Grown Czochralski Silicon

H. Bender, Jan Vanhellemont, R. Schmolke · Japanese Journal of Applied Physics · 1997 · 28 citations

Natural Sciences, Materials Science, Physics +17

Photoelastic stress evaluation and defect monitoring in 300-mm-wafer manufacturing

H.‐D. Geiler, Matthias Wagner, H. Karge et al. · Materials Science in Semiconductor Processing · 2002 · 16 citations

Natural Sciences, Manufacturing Engineering, Materials Science +14

Techniques for analysing nanotopography on polished silicon wafers

Timo Müller, R. Kumpe, H.A. Gerber et al. · Microelectronic Engineering · 2001 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +12