Timo Müller

Statistics

Publications

Citations

230

H-Index

Active since

1995

Affiliations

Brandenburg University of Technology Cottbus-Senftenberg(Current)

Medias Klinikum

Leibniz Institute for High Performance Microelectronics

Institut für Solartechnologien (Germany)

Timo Müller is an author at Brandenburg University of Technology Cottbus-Senftenberg specializing in materials science, materials engineering, and surface science.

Publications per year

1995–2020

Publications

Reactive crystal growth in two dimensions: Silicon nitride on Si(111)

E. Bauer, Yi Wei, Timo Müller et al. · Physical review. B, Condensed matter · 1995 · 62 citations

Natural Sciences, Chemistry, Materials Science +15

Analytical Modeling of the Interaction of Vacancies and Oxygen for Oxide Precipitation in RTA Treated Silicon Wafers

G. Kissinger, J. Dąbrowski, A. Sattler et al. · Journal of The Electrochemical Society · 2007 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +14

Mechanical properties of nitrogen-doped CZ silicon crystals

Hans Richter, A. Fischer, J. Reif et al. · Materials Science in Semiconductor Processing · 2002 · 26 citations

Natural Sciences, Materials Science, Physics +13

Investigation of the Copper Gettering Mechanism of Oxide Precipitates in Silicon

G. Kissinger, Dawid Kot, M. Klingsporn et al. · ECS Journal of Solid State Science and Technology · 2015 · 25 citations · Full text

Engineering, Materials Engineering, Materials Science +13

Techniques for analysing nanotopography on polished silicon wafers

Timo Müller, R. Kumpe, H.A. Gerber et al. · Microelectronic Engineering · 2001 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +12

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