Photoelastic stress evaluation and defect monitoring in 300-mm-wafer manufacturing - Concepedia

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Photoelastic stress evaluation and defect monitoring in 300-mm-wafer manufacturing

16

Citations

6

References

2002

Year

H.‐D. Geiler, Matthias Wagner, H. Karge, Marvin R Paulsen, R. Schmolke

Materials Science in Semiconductor Processing

EngineeringMechanical EngineeringStressstrain AnalysisStructural Health MonitoringResidual StressPhotoelastic Stress EvaluationPhotoelasticityMechanics Of Materials

References

	Year	Citations

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