R. Palla

50 nm-Gate All Around (GAA)-Silicon On Nothing (SON)-devices: a simple way to co-integration of GAA transistors within bulk MOSFET process

S. Monfray, T. Skotnicki, Y. Morand et al. · 2003 · 58 citations

Engineering, Computer Engineering, Electrical Engineering +15

16 nm planar NMOSFET manufacturable within state-of-the-art CMOS process thanks to specific design and optimisation

T. Skotnicki, S. Monfray, C. Julien et al. · 2002 · 56 citations

Engineering, Electrical Engineering, Microelectronics +16

Highly performant double gate MOSFET realized with SON process

S. Harrison, P. Coronel, F. Leverd et al. · 2004 · 54 citations

Engineering, Computer Engineering, Electrical Engineering +14

Impact of chemistry on profile control of resist masked silicon gates etched in high density halogen-based plasmas

X. Detter, R. Palla, I. Thomas-Boutherin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 49 citations

Engineering, Materials Engineering, Materials Science +17

Emerging silicon-on-nothing (SON) devices technology

S. Monfray, T. Skotnicki, C. Fenouillet-Béranger et al. · Solid-State Electronics · 2004 · 48 citations

Engineering, Computer Engineering, Electrical Engineering +12