I. Thomas-Boutherin

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Active since

2003

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

I. Thomas-Boutherin is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in plasma etching, critical dimension control, and passivation.

Publications per year

2003–2003

Publications

Impact of chemistry on profile control of resist masked silicon gates etched in high density halogen-based plasmas

X. Detter, R. Palla, I. Thomas-Boutherin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 49 citations

Engineering, Materials Engineering, Materials Science +17

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