Concepedia

Author

I. Thomas-Boutherin

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Also Known As

I. Thomas-Boutherin, Thomas-Boutherin, I.

2

Publications

48

Citations

1

H-Index

7

Concepts

All Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives
IT

About

I. Thomas-Boutherin is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, electrical engineering, and microfabrication.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

1

1

48

2

Applied Physics

1

1

48

3

Electrical Engineering

1

1

48

4

Microelectronics

1

1

48

5

Microfabrication

1

1

48

I. Thomas-Boutherin

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1

Publications

48

Citations

1

H-Index

YearCitations

Impact of chemistry on profile control of resist masked silicon gates etched in high density halogen-based plasmas

X. Detter, R. Palla, I. Thomas-Boutherin,

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

2003

48

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